Environmental Scanning Electron Microscope
About
A highly versatile scanning electron microscope that is used to chemically and structurally characterise the surface of samples. Special operation modes allow the characterisation of non-conductive or humid materials and imaging in a temperature range of -20 to 1500°C.
Description
Quanta 650 is a highly versatile environmental scanning electron microscope (ESEM) that is able to operate under high vacuum, low vacuum and extended vacuum conditions, enabling the characterisation of uncoated samples in their original state. It operates with a Schottky field emission gun that provides high beam intensity and stability. The electron acceleration voltage ranges from 1 to 30 kV.
Technical specifications:
- Voltage: 1–30 kV
- SEM imaging with a resolution of about 1 nm at 30 kV
- Low vacuum/Environmental SEM Imaging of uncoated materials
- Cooling/Heating stage (in-situ): -20°C to 1500 °C
- SE/BSE/EDXS detectors (Topographical/Structural analysis/Chemical analysis)
- Large chamber that can hold samples of up to 25 cm in diameter
- A multi-holder allows loading of up to 16 samples simultaneously
Case study:
A user needs to monitor the device after each fabrication step. The characterisation of samples can be performed without prior modification (such as coating), even if they are non-conductive. High throughput of different samples is achieved as up to 16 samples, e.g., after different fabrication steps, can be loaded simultaneously.
Optional:
https://inl.int/wp-content/uploads/2024/01/INL_BROCHURES_AEMIS.pdf
Access Provider / Facilities
