SENSE - INFRACHIP

TECHNOLOGIES

Access to three technology blocks for advanced sensing based on state-of-the-art platform technologies such as electrochemical sensors, sustainable and flexible sensors for hybrid integration into conformable and/or biodegradable/recyclable/biobased substrates, and novel integrated photonic sensors

SENSE

Advanced Sensing Technologies

Under this technology pillar Tyndall, NCSRD, JOR, AMO and CNRS will offer their platforms. The offering will be on development of sensors in various domains like magnetic,, optical, electronic, chemical, biological, mechanical with various materials. The offereings will be from design, simulation, fabrication to testing of the sensors.

Stretchable and flexible sensors

JOR and UNOVA will offer their sensor integration platofrom under this technology pillar. The development of the sening platform on this offering will be on semiconductor and flexible substrates.

Photonic Sensing

WUT/ CEZAMAT, AMO and NCSRD will offer their technology on sensor development under this platform. They will offer optical-based sensors technology. They will offer the development of photonic integrated circuits (PICs) operating in visible and mid-IR bands. The offering will also have measurement set up like on-chip spectroscopy using gratings, filters, ring resonators, Mach Zehnder interferometers, arrayed waveguide gratings etc. The application of this technology platforms ranage from bio-diagnostics, food safety, environmental monitoring, forensics etc.

Photolithography

Showroom NCSR Demokritos Devices / Test structures, Dielectric deposition, Dry etching, e-beam lithography, Metal deposition, Optical lithography, Plasma etching, Processing/Fabrication, Wet etching Advanced sensing, Component Neuromorphic computing, Connect, Energy autonomy, Green electronics and substrates, Green sensors, Hybrid SiP/SoC, Photonic sensing, PMU design, Power, Power electronics, Quantum and spin devices engineering, RF components, RF front-end design, Sense, Short-range optical communications, Stretchable and flexible sensors, Sustain, Think

Photolithography commonly refers to the pattern transfer of a photomask to a light-sensitive ma...

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NCSR Demokritos

Rapid Thermal Processing

Showroom NCSR Demokritos Devices / Test structures, Dielectric deposition, Dry etching, e-beam lithography, Metal deposition, Optical lithography, Plasma etching, Processing/Fabrication, Wet etching Advanced sensing, Component Neuromorphic computing, Connect, Energy autonomy, Green electronics and substrates, Green sensors, Hybrid SiP/SoC, Photonic sensing, PMU design, Power, Power electronics, Quantum and spin devices engineering, RF components, RF front-end design, Sense, Short-range optical communications, Stretchable and flexible sensors, Sustain, Think

Rapid Thermal Processing (RTP) is a heat treatment where semiconductor substrates or other mate...

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NCSR Demokritos

Metal Evaporators

Showroom NCSR Demokritos Devices / Test structures, Dielectric deposition, Dry etching, e-beam lithography, Metal deposition, Optical lithography, Plasma etching, Processing/Fabrication, Wet etching Advanced sensing, Component Neuromorphic computing, Connect, Energy autonomy, Green electronics and substrates, Green sensors, Hybrid SiP/SoC, Photonic sensing, PMU design, Power, Power electronics, Quantum and spin devices engineering, RF components, RF front-end design, Sense, Short-range optical communications, Stretchable and flexible sensors, Sustain, Think

Metal evaporation is a versatile high-vacuum physical vapour deposition technique for producing...

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NCSR Demokritos

Ion Implanter

Showroom NCSR Demokritos Devices / Test structures, Dielectric deposition, Dry etching, e-beam lithography, Metal deposition, Optical lithography, Plasma etching, Processing/Fabrication, Wet etching Advanced sensing, Component Neuromorphic computing, Connect, Energy autonomy, Green electronics and substrates, Green sensors, Hybrid SiP/SoC, Photonic sensing, PMU design, Power, Power electronics, Quantum and spin devices engineering, RF components, RF front-end design, Sense, Short-range optical communications, Stretchable and flexible sensors, Sustain, Think

Implantation of atoms or molecules into a solid to modify its physicochemical properties. This ...

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NCSR Demokritos

Furnace Thermal Processing

Showroom NCSR Demokritos Devices / Test structures, Dielectric deposition, Dry etching, e-beam lithography, Metal deposition, Optical lithography, Plasma etching, Processing/Fabrication, Wet etching Advanced sensing, Component Neuromorphic computing, Connect, Energy autonomy, Green electronics and substrates, Green sensors, Hybrid SiP/SoC, Photonic sensing, PMU design, Power, Power electronics, Quantum and spin devices engineering, RF components, RF front-end design, Sense, Short-range optical communications, Stretchable and flexible sensors, Sustain, Think

Thermal treatments at atmospheric pressure in hot-walled quartz tube furnaces under oxidizing o...

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NCSR Demokritos

Electron Beam Lithography

Showroom NCSR Demokritos Devices / Test structures, Dielectric deposition, Dry etching, e-beam lithography, Metal deposition, Optical lithography, Plasma etching, Processing/Fabrication, Wet etching Advanced sensing, Component Neuromorphic computing, Connect, Energy autonomy, Green electronics and substrates, Green sensors, Hybrid SiP/SoC, Photonic sensing, PMU design, Power, Power electronics, Quantum and spin devices engineering, RF components, RF front-end design, Short-range optical communications, Sustain, Think

Electron beam lithography (EBL) is a versatile mask-less (“direct-write”) patterning techni...

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NCSR Demokritos

Dry (Plasma) Etching

Showroom NCSR Demokritos Devices / Test structures, Dielectric deposition, Dry etching, e-beam lithography, Metal deposition, Optical lithography, Plasma etching, Processing/Fabrication, Wet etching Advanced sensing, Component Neuromorphic computing, Connect, Energy autonomy, Green electronics and substrates, Green sensors, Hybrid SiP/SoC, Photonic sensing, PMU design, Power, Power electronics, Quantum and spin devices engineering, RF components, RF front-end design, Sense, Short-range optical communications, Stretchable and flexible sensors, Sustain, Think

Dry Etching of dielectric, semiconductor and metal layers using Reactive Ion Etching (RIE) and ...

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NCSR Demokritos

LPCVD

Showroom NCSR Demokritos Devices / Test structures, Dielectric deposition, Dry etching, e-beam lithography, Metal deposition, Optical lithography, Plasma etching, Processing/Fabrication, Wet etching Advanced sensing, Component Neuromorphic computing, Connect, Energy autonomy, Green electronics and substrates, Green sensors, Hybrid SiP/SoC, Photonic sensing, PMU design, Power, Power electronics, Quantum and spin devices engineering, RF components, RF front-end design, Sense, Short-range optical communications, Stretchable and flexible sensors, Sustain, Think

Low-Pressure Chemical Vapor Deposition (LPCVD) is a thermal process used to produce thin films ...

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NCSR Demokritos

Photonic Circuits and Devices

Showroom NCSR Demokritos Devices / Test structures, Dielectric deposition, Dry etching, e-beam lithography, Metal deposition, Metrology / Characterisation, Modelling / Database, Optical, Optical lithography, Physical/Structural, Plasma etching, Processing/Fabrication, Wet etching Advanced sensing, Photonic sensing, Sense

Silicon nitride passive photonic elements, integrated circuits and devices operating in the VIS...

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NCSR Demokritos

Project details:

TITLE: European Research Infrastructure on Semiconductor Chips

START-END: January 2024 – December2027
EU CONTRIBUTION: 14 457 463 €
TOPIC: HORIZON-INFRA-2023-SERV-01

Contact:

Coordinator: Tyndall National Institute

INFRACHIP (2024-2027) has received funding from the European Union’s Horizon Europe research and innovation actions under GA No. 101131822

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