Entries by Mathilde Bétend

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Photolithography

Photolithography commonly refers to the pattern transfer of a photomask to a light-sensitive material deposited on a substrate.

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Rapid Thermal Processing

Rapid Thermal Processing (RTP) is a heat treatment where semiconductor substrates or other materials are exposed to high temperatures for short periods of time with ramp rates typically in the range from 100 to 300 °C/s.

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Metal Evaporators

Metal evaporation is a versatile high-vacuum physical vapour deposition technique for producing metal coatings.

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Ion Implanter

Implantation of atoms or molecules into a solid to modify its physicochemical properties. This technique is widely used for the fabrication of active electronic components like diodes and transistors.

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Furnace Thermal Processing

Thermal treatments at atmospheric pressure in hot-walled quartz tube furnaces under oxidizing or neutral / forming gas ambient.

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Electron Beam Lithography

Electron beam lithography (EBL) is a versatile mask-less (“direct-write”) patterning technique based on the exposure of an electron-sensitive material (termed as resist) to a focused electron beam.

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Dry (Plasma) Etching

Dry Etching of dielectric, semiconductor and metal layers using Reactive Ion Etching (RIE) and Atomic Layer Etching (ALE) modes