Tag Archive for: ICP
![](https://infrachip.eu/wp-content/uploads/2024/04/CEZAMAT_7-dry_etching-495x400.jpg)
Dry etching
Showroom WUT CEZAMAT Dry etching, Processing/Fabrication Energy autonomy, Photonic sensing, Power, SenseDry etching processes using ICP RIE plasma tool. Tool allows for cryogenic temperature processi...
Access Provider / Facilities
![](https://infrachip.eu/wp-content/uploads/2024/02/WUT_CEZAMAT.png)
WUT CEZAMAT