Hyperfrequency Characterisation Platform
About
This platform is dedicated to the analysis and characterization, on a wide band of frequency, of electronic and microelectronic devices such as: on wafer integrated circuits (2D, 3D) and on printed circuits board (PCB) devices. Actives and passives components, solid materials and liquids are analysed and characterized.
Description
The platform is composed of:
– A probe station (Form Factor Elite 300)
* 300 mm Semi-automated Probe System which is able to receive 300 mm diameter wafer.
* An E-view microscope/camera with a magnification of 120.
* A thermal chuck to test circuits up to 300° C.
* Micro positioners receiving high frequency probes such as “Form factor GSG Infinity I 110” probe
for example.
* Driving software: Nucleus.
– A dedicated vector network analyzer Keysight PNA-X N5247B with mmW N5250CX extensions:
* in 2 ports configuration, frequency band from 10 MHz up to 110.
* in 4 ports configuration, frequency band from 10 MHz up to 67 GHz, with True Mode Stimulus
S93460B option, extended biasing capabilities.
– A bench with a vector network analyzer (VNA) Anritsu 37397C operating at the frequency band
40MHz up to 67 GHz.
– A bench with 2 low frequency VNAs: Keysight P9372A (300 KHz – 9 GHz) and Keysight P9373A (300
KHz- 14 GHz).
– A Keysight Precision Source / Measure Unit (SMU) B2902A
– A Profilometer – KLA-TENCOR Alpha D500.
Web link: https://croma.grenoble-inp.fr/fr/plateformes/electromagnetisme
Technical specifications:
– Two ports VNA high frequency measurements from 10 MHz up to 110 GHz.
– Four ports VNA high frequency measurements from 10 MHz up to 67 GHz.
– Up to 300 mm diameter wafers can be analyzed.
– Heating system operating up to 300° C for testing devices in temperature.
Case study:
Different measurements, analysis, extractions can be performed with this setup:
– S parameters measurements and devices analysis as function of:
* Frequency.
* Temperature.
* Voltage bias, current bias or static electric field.
* Power of high frequency injected signal.
– Extraction of electrical parameters of passives and actives components models.
– Extraction of electromagnetic properties (complex permittivity and permeability) of solid materials
and liquids.
Access Provider / Facilities
