Electron Beam Lithography
Showroom NCSR Demokritos Devices / Test structures, Dielectric deposition, Dry etching, e-beam lithography, Metal deposition, Optical lithography, Plasma etching, Processing/Fabrication, Wet etching Advanced sensing, Component Neuromorphic computing, Connect, Energy autonomy, Green electronics and substrates, Green sensors, Hybrid SiP/SoC, Photonic sensing, PMU design, Power, Power electronics, Quantum and spin devices engineering, RF components, RF front-end design, Short-range optical communications, Sustain, ThinkElectron beam lithography (EBL) is a versatile mask-less (“direct-write”) patterning techni...
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NCSR Demokritos
Dry (Plasma) Etching
Showroom NCSR Demokritos Devices / Test structures, Dielectric deposition, Dry etching, e-beam lithography, Metal deposition, Optical lithography, Plasma etching, Processing/Fabrication, Wet etching Advanced sensing, Component Neuromorphic computing, Connect, Energy autonomy, Green electronics and substrates, Green sensors, Hybrid SiP/SoC, Photonic sensing, PMU design, Power, Power electronics, Quantum and spin devices engineering, RF components, RF front-end design, Sense, Short-range optical communications, Stretchable and flexible sensors, Sustain, ThinkDry Etching of dielectric, semiconductor and metal layers using Reactive Ion Etching (RIE) and ...
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NCSR Demokritos
Automatic Dicing Saw
Showroom NCSR Demokritos Devices / Test structures, Dielectric deposition, Dry etching, e-beam lithography, Metal deposition, Optical lithography, Plasma etching, Processing/Fabrication, Wet etchingDicing of substrates into individual units by using a circular saw fitted with a thin diamond b...
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NCSR Demokritos
LPCVD
Showroom NCSR Demokritos Devices / Test structures, Dielectric deposition, Dry etching, e-beam lithography, Metal deposition, Optical lithography, Plasma etching, Processing/Fabrication, Wet etching Advanced sensing, Component Neuromorphic computing, Connect, Energy autonomy, Green electronics and substrates, Green sensors, Hybrid SiP/SoC, Photonic sensing, PMU design, Power, Power electronics, Quantum and spin devices engineering, RF components, RF front-end design, Sense, Short-range optical communications, Stretchable and flexible sensors, Sustain, ThinkLow-Pressure Chemical Vapor Deposition (LPCVD) is a thermal process used to produce thin films ...
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NCSR Demokritos
Photonic Circuits and Devices
Showroom NCSR Demokritos Devices / Test structures, Dielectric deposition, Dry etching, e-beam lithography, Metal deposition, Metrology / Characterisation, Modelling / Database, Optical, Optical lithography, Physical/Structural, Plasma etching, Processing/Fabrication, Wet etching Advanced sensing, Photonic sensing, SenseSilicon nitride passive photonic elements, integrated circuits and devices operating in the VIS...
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NCSR Demokritos
Direct laser writing (DLW) facilities
Showroom Tyndall Dielectric deposition, Dry etching, e-beam lithography, Metal deposition, Optical lithography, Plasma etching, Processing/Fabrication, Wet etching Advanced sensing, Green electronics and substrates, Green sensors, Hybrid SiP/SoC, Photonic sensing, Sense, Stretchable and flexible sensors, SustainDirect laser writing is a fabrication technique that uses a focused laser beam to create precis...
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Tyndall
Printed Sensor Fab (PRINTSENS)
Showroom JOANNEUM RESEARCH Devices / Test structures, Dielectric deposition, Dry etching, e-beam lithography, Electrical, Magnetic, Mechanical, Metal deposition, Metrology / Characterisation, Optical, Optical lithography, Physical/Structural, Plasma etching, Printing, Processing/Fabrication, Wet etching Green sensors, Sense, Stretchable and flexible sensors, SustainPRINTSENS covers the whole development chain for printed sensors
- design & specification
- ...
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JOANNEUM RESEARCH
Thermoelectric materials and devices
Showroom Tyndall Devices / Test structures, Dielectric deposition, Dry etching, e-beam lithography, Electrical, Mechanical, Metal deposition, Metrology / Characterisation, Modelling / Database, Optical lithography, Physical/Structural, Plasma etching, Processing/Fabrication, Wet etching Energy autonomy, PowerMicro-thermoelectric generator for energy harvesting from waste heat and micro-thermoelectric c...
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Tyndall
Flexifab Nanofabrication Cleanroom
Showroom Tyndall Dielectric deposition, Dry etching, e-beam lithography, Metal deposition, Optical lithography, Plasma etching, Processing/Fabrication, Wet etching Advanced sensing, Component Neuromorphic computing, Connect, Energy autonomy, Green electronics and substrates, Green sensors, Hybrid SiP/SoC, Non-volatile memories, Photonic sensing, PMU design, Power, Power electronics, Quantum and spin devices engineering, RF components, RF front-end design, Sense, Short-range optical communications, Stretchable and flexible sensors, Sustain, ThinkAccess to Tyndall FlexiFab Clean Room for non-standard processing...
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Tyndall
3D – confocal laser microscope
Showroom JOANNEUM RESEARCH Dielectric deposition, Dry etching, e-beam lithography, Metal deposition, Metrology / Characterisation, Optical, Optical lithography, Physical/Structural, Plasma etching, Processing/Fabrication, Wet etching Advanced sensing, Green electronics and substrates, Green sensors, Hybrid SiP/SoC, Photonic sensing, Sense, Stretchable and flexible sensors, SustainThe 3D laser scanning microscope of the VK-X1050 model series uses two different measurement pr...
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JOANNEUM RESEARCH