e-beam lithography Archives - INFRACHIP

Tag Archive for: e-beam lithography

Cleanroom Broad Fabrication Platform

Showroom Chalmers University Dielectric deposition, Dry etching, e-beam lithography, Metal deposition, Metrology / Characterisation, Optical, Optical lithography, Physical/Structural, Plasma etching, Processing/Fabrication, Wet etching Connect, Power, Power electronics, Quantum and spin devices engineering, RF components, Think

Myfab Chalmers offers a range of cleanrooms processes for full micro/nanofabrication. Depositio...

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Chalmers University

Project details:

TITLE: European Research Infrastructure on Semiconductor Chips

START-END: January 2024 – December2027
EU CONTRIBUTION: 14 457 463 €
TOPIC: HORIZON-INFRA-2023-SERV-01

Contact:

Coordinator: Tyndall National Institute

INFRACHIP (2024-2027) has received funding from the European Union’s Horizon Europe research and innovation actions under GA No. 101131822

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