About

Variable Angle Spectroscopic Ellipsometer from J.A.Woollam Inc. for research on all types of materials: semiconductors, dielectrics, polymers, metals, multi-layers.

Description

Spectroscopic ellipsometry is an optical technique using the relative phase and amplitude changes in polarized light reflected from a surface or a thin film to characterize optical sample properties like refractive index, absorption coefficient and film thickness. The measured data are used to establish a model of the sample containing dispersion relations to describe the sample properties. It combines high accuracy and precision with a wide spectral range – from 240 to 1700nm. Variable wavelength and angle of incidence allow flexible measurement capabilities, including: 

  • Reflection and Transmission Ellipsometry
  • Generalized Ellipsometry (Anisotropy, Retardance, Birefringence)
  • Reflectance (R) and Transmittance (T) intensity
  • Cross-polarized R/T,
  • Depolarization,
  • Scatterometry,
  • Mueller-matrix

Technical specifications:

Specifications 

Ellipsometer Configuration: RAE with AutoRetarder 

Wavelength Range: 240-1700 nm (UV / VIS / NIR) 

Number of Wavelengths: User defined before measurement  

Angles of Incidence: 15°-90°  

Data Acquisition Rate: 0.1 to 3 seconds per wavelength 

Max substrate thickness: 20mm 

Additional microspot optics for reduction of measurement spot diameter from 3mm to 200µm 

Sample maximum dimension ~ 10×10 cm, minimum dimension 1×1 cm 

 

Additional information: https://www.jawoollam.com/products/vase-ellipsometer

Access Provider / Facilities

JOANNEUM RESEARCH