Flexifab Nanofabrication Cleanroom
About
Access to Tyndall FlexiFab Clean Room for non-standard processing
Description
Range of cleanrooms designed for flexible process & product development
- Silicon MOS Fabrication
- MEMS Fabrication
- Compound Semiconductor Fabrication
- Photonics Fab Training Facility
- e-Beam Lithography
- Non-standard nano-processing
Technical specifications:
Lithography
- Photo and e-beam lithography
Metal/dielectric deposition
- e-beam evaporation
- Temescal FC2000: Metals. 5mm pieces to 100mm wafers. Rate: 0.1Å/s to 20Å/s
- Temescal/Ferotec UFC4900: Metals. 5mm pieces to 200mm wafers. Rate: 0.2Å/s to 50Å/s
- Oxford PVD: Metals. 100mm wafers
- Leybold SyrusPRO 720: dielectric coater. 5mm pieces to 100mm wafers. Rate: 0.1Å/s to 20Å/s
- Sputtering
- Nordiko 2500: ∅4″ Up to 12 wafers. Substrate bias (RF & DC). Process gases: Ar, N2
- Lesker Sputterer: ∅4″ or ∅6″ Substrate bias (RF & DC). Substrate heater (up to 500°C). Process gases: Ar, O2, N2
- PECVD
- STS PECVD: ∅4” 300°C. Applications Films: SiO2, Si3N4, low-stress Si3N3
- Electroplating: Digital Matrix Copper Plating
Etching
- Oxford ICP plasma etcher for thin film III-V materials, GaAs, InP and ternary alloys, GaN, AlN and ITO using Cl-based chemistry
- Synapse Plasma etcher for thin film dielectric materials, SiO2, Si3N4, SiC and BCB using F- based chemistry
Other
- Wafer bonding
- Wafer cleaning
Case study:
Examples of nanoelectronic devices and test structures fabricated at FlexiFab
- Integration of new materials, device and subsystem concepts
- Nanoelectronics, nanophotonics, nanobiotechnology
- Devices, sensors and NEMS
- e-beam for nanowire patterning – sub 10nm dimensions
- Technologies for 2D contacting to nano-scale structures
- e-beam contacting on flakes: Graphene, transition metal dichalcogenides (TMD) monolayers (e.g. MoS2)
- Metal contact tracks enabled using the electron beam or FIB (Focused ion beam) milling – allows customization of nanowire structures at dimensions of 10nm
Optional:
Flexifab Nanofabrication Cleanroom (3D Virtual Tour)