Bruker Atomic Force Microscope (AFM) – Dimension Icon


The Dimension Icon from Bruker performs many scanning probe microscopy operations including Tapping Mode, Contact Mode, Force Spectroscopy, Surface Potential, and Piezoresponse Microscopy.

With Peak Force Tapping, high-resolution images can be acquired in a matter of minutes and for multiple samples if required. Peak force tapping also allows the user to collect nano-mechanical information (e.g. friction, adhesion, deformation) as it scans the materials surface and correlate that with the AFM image. A collection of nano-electrical modes is available with the system, some of which include Kelvin Probe Force Microscopy (KPFM), Scanning Spreading Resistance Microscopy (SSRM), Scanning Capacitance Microscopy (SCM) and Peak Force-TUNA (C-AFM).

These modes can be combined with a feature called DataCube whereby the user can examine the samples characteristics in more detail – e.g. Correlated electrical & mechanical properties in a single measurement.

Technical specifications:

Wafer size: Up to 200mm wafers

Temperature Range: Room Temperature

Fully Automated: Single Wafer Only

RF on Wafer characterisation: No

Case study:

A user is developing nano-scale meta lenses. Thin film (115nm) of amorphous silicon (a-Si) is deposited on pyrex. To create an e-beam mask and etching mask a ZEP resist was applied to the sample by a spinner. The metalenses are fabricated using e-beam lithography. AFM is then used to study the surface of the metalalenses. The metalens has a high numerical aperture and focuses laser light with a wavelength of 532nm into a subwavelength light ring.


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