photonic sensors Archives - INFRACHIP

Tag Archive for: photonic sensors

Photonic Integrated Circuits

Showroom WUT CEZAMAT Devices / Test structures, Dielectric deposition, Dry etching, e-beam lithography, Electrical, Metal deposition, Metrology / Characterisation, Modelling / Database, Optical, Optical lithography, Plasma etching, Processing/Fabrication, Wet etching Photonic sensing, Sense

Silicon nitride passive photonic integrated circuits operating in VIS and C-band for user-defin...

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WUT CEZAMAT

Dry etching

Showroom WUT CEZAMAT Dry etching, Processing/Fabrication Energy autonomy, Photonic sensing, Power, Sense

Dry etching processes using ICP RIE plasma tool. Tool allows for cryogenic temperature processi...

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WUT CEZAMAT

High temperature processes

Showroom WUT CEZAMAT Dielectric deposition, Dry etching, e-beam lithography, Metal deposition, Optical lithography, Plasma etching, Processing/Fabrication, Wet etching Energy autonomy, Photonic sensing, Power, Sense

High-temperature processes (boron diffusion, oxidation, LPCVD, and thermal annealing) in furnac...

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WUT CEZAMAT

Wet processes

Showroom WUT CEZAMAT Processing/Fabrication, Wet etching Energy autonomy, Photonic sensing, Power, Sense

We offer efficient and reproducible wet cleaning processes of photomasks and substrates, as wel...

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WUT CEZAMAT

Thin film deposition

Showroom WUT CEZAMAT Dielectric deposition, Metal deposition, Processing/Fabrication Energy autonomy, Photonic sensing, Power, Sense

Layer deposition of metal and dielectric layers using magnetron sputtering and PECVD....

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WUT CEZAMAT

Photolithography

Showroom WUT CEZAMAT Optical lithography, Processing/Fabrication Energy autonomy, Photonic sensing, Power, Sense

UV photolithography process with um resolution for patterning the predefined shapes in a photor...

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WUT CEZAMAT

Project details:

TITLE: European Research Infrastructure on Semiconductor Chips

START-END: January 2024 – December2027
EU CONTRIBUTION: 14 457 463 €
TOPIC: HORIZON-INFRA-2023-SERV-01

Contact:

Coordinator: Tyndall National Institute

INFRACHIP (2024-2027) has received funding from the European Union’s Horizon Europe research and innovation actions under GA No. 101131822

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