Tag Archive for: photonic sensors
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Dry etching
Showroom WUT CEZAMAT Dry etching, Processing/Fabrication Energy autonomy, Photonic sensing, Power, SenseDry etching processes using ICP RIE plasma tool. Tool allows for cryogenic temperature processi...
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High temperature processes
Showroom WUT CEZAMAT Dielectric deposition, Dry etching, e-beam lithography, Metal deposition, Optical lithography, Plasma etching, Processing/Fabrication, Wet etching Energy autonomy, Photonic sensing, Power, SenseHigh-temperature processes (boron diffusion, oxidation, LPCVD, and thermal annealing) in furnac...
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Wet processes
Showroom WUT CEZAMAT Processing/Fabrication, Wet etching Energy autonomy, Photonic sensing, Power, SenseWe offer efficient and reproducible wet cleaning processes of photomasks and substrates, as wel...
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WUT CEZAMAT
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Thin film deposition
Showroom WUT CEZAMAT Dielectric deposition, Metal deposition, Processing/Fabrication Energy autonomy, Photonic sensing, Power, Sense Layer deposition of metal and dielectric layers using magnetron sputtering and PECVD....
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Photonic Integrated Circuits
Showroom WUT CEZAMAT Devices / Test structures, Dielectric deposition, Dry etching, e-beam lithography, Electrical, Metal deposition, Metrology / Characterisation, Modelling / Database, Optical, Optical lithography, Plasma etching, Processing/Fabrication, Wet etching Photonic sensing, SenseSilicon nitride passive photonic integrated circuits operating in VIS and C-band for user-defin...
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Photolithography
Showroom WUT CEZAMAT Optical lithography, Processing/Fabrication Energy autonomy, Photonic sensing, Power, SenseUV photolithography process with um resolution for patterning the predefined shapes in a photor...
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