Tag Archive for: RIE
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Dry etching
Showroom WUT CEZAMAT Dry etching, Processing/Fabrication Energy autonomy, Photonic sensing, Power, SenseDry etching processes using ICP RIE plasma tool. Tool allows for cryogenic temperature processi...
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WUT CEZAMAT
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Advanced Dry Etching Platform
Showroom Chalmers University Dry etching, Plasma etching, Processing/Fabrication, Wet etching Connect, Power, Power electronics, Quantum and spin devices engineering, RF components, ThinkMyfab Chalmers offers several tools and ready-to-use recipes for etching of diverse materials a...
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Chalmers University
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Cleanroom Broad Fabrication Platform
Showroom Chalmers University Dielectric deposition, Dry etching, e-beam lithography, Metal deposition, Metrology / Characterisation, Optical, Optical lithography, Physical/Structural, Plasma etching, Processing/Fabrication, Wet etching Connect, Power, Power electronics, Quantum and spin devices engineering, RF components, ThinkMyfab Chalmers offers a range of cleanrooms processes for full micro/nanofabrication. Depositio...
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Chalmers University