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Wet bench for imprint processes: Arias Lithography wet bench: Arias Standard cleaning: Arias

Description

Arias Imprint Wet bench: Single wafer, batch and samples; cleaning and resist processes, up to 8″ wafer

Arias Lithography wet bench: Single wafer, batch and samples; cleaning and resist processes, up to 8″ wafers

Arias Standard cleaning: Single wafer and batch; cleaning processes, up to 8″ wafers

Access Provider / Facilities

AMO GmbH