UNINOVA offers the access to the entire value chain related to the design, simulation, fabrication and characterization of circuits based on oxide thin-film transistors (TFTs) for signal conditioning/addressing/processing to couple with sensors, both on rigid and flexible substrates.


Core competences offered:

  • Physical level simulation of oxide TFTs with different geometries and materials
  • Design, simulation, fabrication and characterization of oxide TFT circuits with low-to-medium complexity, using in-house clean room processes
  • Supporting design and simulation of oxide TFT circuits with medium-to-high complexity, making use of commercial PDK for subsequent tapeout requests to external foundry by users

Major tools:

  • Silvaco TCAD suite for physics-based simulation of oxide TFTs
  • Circuit design and simulation in Cadence environment
  • Tools for oxide TFT fabrication and circuit integration, including sputtering, ALD, direct laser writing, etching and nanoimprint lithography. Printing available for low-transistor count circuits
  • Failure analysis, including SEM/FIB cross section analysis, EBIC-based techniques, STEM for interfacial analysis
  • Electrical characterization of circuits, including semiconductor parameter analyzers with IV, pulsed-IV and CV capabilities, oscilloscopes, signal generators, manual probe stations, probe stations with temperature, light and environmental control

Technical specifications:


  • Glass or flexible substrates (up to 4” size)
  • TFT channel length between 200 µm and 600 nm, depending on processing technology


  • Up to 2” size for SEM/FIB
  • Electrical characterization in probe stations – up to 4” substrate and up to 6 I/O pads (beyond that requires PCB integration)

Case study:

A user has the requirement to have a glass or flexible substrate including all the circuitry required for signal conditioning/addressing/processing of sensors, eventually even integrating both sensors and circuits within the same substrate.








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