WUT CEZAMAT Archives

Photonic Integrated Circuits

Showroom WUT CEZAMAT Devices / Test structures, Dielectric deposition, Dry etching, e-beam lithography, Electrical, Metal deposition, Metrology / Characterisation, Modelling / Database, Optical, Optical lithography, Plasma etching, Processing/Fabrication, Wet etching Photonic sensing, Sense

Silicon nitride passive photonic integrated circuits operating in VIS and C-band for user-defin...

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WUT CEZAMAT

Hybrid Chip-Integration Laboratory

Showroom WUT CEZAMAT Electrical, Mechanical, Metrology / Characterisation, Optical, Physical/Structural Hybrid SiP/SoC, Sustain

In this laboratory we offer electronic assembly with the use of our Finetech Flip-Chip Pico dev...

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WUT CEZAMAT

Sustainable sensor Laboratory

Showroom WUT CEZAMAT Electrical, Mechanical, Optical, Physical/Structural, Printing, Processing/Fabrication Advanced sensing, Green electronics and substrates, Green sensors, Sense, Stretchable and flexible sensors, Sustain

In this laboratory we provide service of material manufacturing as well as necessary characteri...

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WUT CEZAMAT

Electron beam lithography

Showroom WUT CEZAMAT e-beam lithography, Processing/Fabrication Energy autonomy, Photonic sensing, Power, Sense

Electron beam lithography is a precise technique for patterning with a nanometer resolution. Th...

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WUT CEZAMAT

Dry etching

Showroom WUT CEZAMAT Dry etching, Processing/Fabrication Energy autonomy, Photonic sensing, Power, Sense

Dry etching processes using ICP RIE plasma tool. Tool allows for cryogenic temperature processi...

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WUT CEZAMAT

High temperature processes

Showroom WUT CEZAMAT Dielectric deposition, Dry etching, e-beam lithography, Metal deposition, Optical lithography, Plasma etching, Processing/Fabrication, Wet etching Energy autonomy, Photonic sensing, Power, Sense

High-temperature processes (boron diffusion, oxidation, LPCVD, and thermal annealing) in furnac...

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WUT CEZAMAT

Energy harvesters analysis

Showroom WUT CEZAMAT Electrical, Metrology / Characterisation, Modelling / Database, Optical, Physical/Structural Energy autonomy, Power

Analysis of the Energy Harvesters (EH) from theoretical, numerical and experimental standpoint....

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WUT CEZAMAT

Wet processes

Showroom WUT CEZAMAT Processing/Fabrication, Wet etching Energy autonomy, Photonic sensing, Power, Sense

We offer efficient and reproducible wet cleaning processes of photomasks and substrates, as wel...

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WUT CEZAMAT

Thin film deposition

Showroom WUT CEZAMAT Dielectric deposition, Metal deposition, Processing/Fabrication Energy autonomy, Photonic sensing, Power, Sense

Layer deposition of metal and dielectric layers using magnetron sputtering and PECVD....

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WUT CEZAMAT

Photolithography

Showroom WUT CEZAMAT Optical lithography, Processing/Fabrication Energy autonomy, Photonic sensing, Power, Sense

UV photolithography process with um resolution for patterning the predefined shapes in a photor...

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WUT CEZAMAT

Photonic Integrated Circuits

Hybrid Chip-Integration Laboratory

Sustainable sensor Laboratory

Electron beam lithography

Dry etching

High temperature processes

Energy harvesters analysis

Wet processes

Thin film deposition

Photolithography

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