
Deposition Processes
Showroom INL Dielectric deposition, Metal deposition, Processing/Fabrication Advanced sensing, Component Neuromorphic computing, Energy autonomy, Photonic sensing, Power, Quantum and spin devices engineering, Sense, Stretchable and flexible sensors, ThinkThe INL Cleanroom offers a comprehensive set of equipment for thin-film deposition by PVD and C...
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INL

FIB-STEM
Showroom CNRS-FMNT Metrology / Characterisation, Physical/Structural Component Neuromorphic computing, Connect, Energy autonomy, Hybrid SiP/SoC, PMU design, Power, Power electronics, Quantum and spin devices engineering, RF components, RF front-end design, Short-range optical communications, Sustain, ThinkThis tool consists of a scanning electronic microscope SEM equipped with a focalized ion beam F...
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CNRS-FMNT

Terahertz characterisation
Showroom CNRS-FMNT Electrical, Magnetic, Mechanical, Metrology / Characterisation, Optical, Physical/Structural Advanced sensing, Component Neuromorphic computing, Connect, Energy autonomy, Green electronics and substrates, Green sensors, Hybrid SiP/SoC, Photonic sensing, PMU design, Power, Power electronics, Quantum and spin devices engineering, RF components, RF front-end design, Sense, Short-range optical communications, Stretchable and flexible sensors, Sustain, ThinkTerahertz characterisation - PLATERA platform: Terahertz (50 GHz – 4 THz) characterization an...
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CNRS-FMNT

Insulating Material Characterization
Showroom CNRS-FMNT Devices / Test structures, Electrical, Metrology / Characterisation Advanced sensing, Component Neuromorphic computing, Energy autonomy, Green electronics and substrates, Green sensors, Power, Sense, Stretchable and flexible sensors, Sustain, ThinkThis test bench is dedicated for characterizing the electrical properties of insulators within ...
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CNRS-FMNT

Quantum superconducting circuits
Showroom Chalmers University Dielectric deposition, Dry etching, e-beam lithography, Metal deposition, Optical lithography, Plasma etching, Processing/Fabrication Component Neuromorphic computing, Quantum and spin devices engineering, ThinkWe offer a complete processing platform for fabrication of both low-Tc and high-Tc superconduct...
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Chalmers University

Complex oxide electronics
Showroom Chalmers University Dielectric deposition, e-beam lithography, Metrology / Characterisation, Optical lithography, Physical/Structural, Processing/Fabrication Component Neuromorphic computing, Quantum and spin devices engineering, ThinkWe offer a complete platform for fabrication of complex perovskite-based oxide devices, includi...
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Chalmers University

Wet Chemistry
Showroom AMO GmbH Devices / Test structures, Dielectric deposition, Dry etching, e-beam lithography, Electrical, Magnetic, Mechanical, Metal deposition, Metrology / Characterisation, Modelling / Database, Optical, Optical lithography, Physical/Structural, Plasma etching, Processing/Fabrication, Wet etching Advanced sensing, Component Neuromorphic computing, Connect, Photonic sensing, Quantum and spin devices engineering, RF components, RF front-end design, Sense, Short-range optical communications, Stretchable and flexible sensors, ThinkWet bench for imprint processes: Arias
Lithography wet bench: Arias
Standard cleaning: Arias
...
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AMO GmbH

Dry Etching
Showroom AMO GmbH Devices / Test structures, Dielectric deposition, Dry etching, e-beam lithography, Electrical, Magnetic, Mechanical, Metal deposition, Metrology / Characterisation, Modelling / Database, Optical, Optical lithography, Physical/Structural, Plasma etching, Processing/Fabrication, Wet etching Advanced sensing, Component Neuromorphic computing, Connect, Photonic sensing, Quantum and spin devices engineering, RF components, RF front-end design, Sense, Short-range optical communications, Stretchable and flexible sensors, ThinkInductively Coupled Plasma Reactive Ion Etcher(ICP-RIE): Oxford Instruments PlasmaLab System 10...
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AMO GmbH

Deposition
Showroom AMO GmbH Devices / Test structures, Dielectric deposition, Dry etching, e-beam lithography, Electrical, Magnetic, Mechanical, Metal deposition, Metrology / Characterisation, Modelling / Database, Optical, Optical lithography, Physical/Structural, Plasma etching, Processing/Fabrication, Wet etching Advanced sensing, Component Neuromorphic computing, Connect, Photonic sensing, Quantum and spin devices engineering, RF components, RF front-end design, Sense, Short-range optical communications, Stretchable and flexible sensors, ThinkSputtering system: Creavac Creamet500s
E-beam evaporator: FHR Star 200 EVA,
Plasma-enhance...
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AMO GmbH

Advanced Lithography Tool
Showroom AMO GmbH Devices / Test structures, Dielectric deposition, Dry etching, e-beam lithography, Electrical, Magnetic, Mechanical, Metal deposition, Metrology / Characterisation, Modelling / Database, Optical, Optical lithography, Physical/Structural, Plasma etching, Processing/Fabrication, Wet etching Advanced sensing, Component Neuromorphic computing, Connect, Photonic sensing, Quantum and spin devices engineering, RF components, RF front-end design, Sense, Short-range optical communications, Stretchable and flexible sensors, ThinkElectron Beam Lithography(EBL): Raith EBPG 5200
Photolithography(PL): Semi-Automatic Mask Ali...
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AMO GmbH