Cleanroom Characterization
Showroom Chalmers University Electrical, Mechanical, Metrology / Characterisation, Optical, Physical/Structural Connect, Power, Power electronics, Quantum and spin devices engineering, RF components, ThinkMyfab Chalmers offers a range of characterization tools for fabricated devices. Scanning electr...
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Chalmers University
Automatized characterization
Showroom Chalmers University Metrology / Characterisation, Optical, Physical/Structural Connect, Power, Power electronics, Quantum and spin devices engineering, RF components, ThinkMyfab Chalmers offers optical and electron microscopy tools for automatized morphological chara...
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Chalmers University
Advanced Dry Etching Platform
Showroom Chalmers University Dry etching, Plasma etching, Processing/Fabrication, Wet etching Connect, Power, Power electronics, Quantum and spin devices engineering, RF components, ThinkMyfab Chalmers offers several tools and ready-to-use recipes for etching of diverse materials a...
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Chalmers University
Wet Chemistry
Showroom AMO GmbH Devices / Test structures, Dielectric deposition, Dry etching, e-beam lithography, Electrical, Magnetic, Mechanical, Metal deposition, Metrology / Characterisation, Modelling / Database, Optical, Optical lithography, Physical/Structural, Plasma etching, Processing/Fabrication, Wet etching Advanced sensing, Component Neuromorphic computing, Connect, Photonic sensing, Quantum and spin devices engineering, RF components, RF front-end design, Sense, Short-range optical communications, Stretchable and flexible sensors, ThinkWet bench for imprint processes: Arias
Lithography wet bench: Arias
Standard cleaning: Arias
...
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AMO GmbH
Dry Etching
Showroom AMO GmbH Devices / Test structures, Dielectric deposition, Dry etching, e-beam lithography, Electrical, Magnetic, Mechanical, Metal deposition, Metrology / Characterisation, Modelling / Database, Optical, Optical lithography, Physical/Structural, Plasma etching, Processing/Fabrication, Wet etching Advanced sensing, Component Neuromorphic computing, Connect, Photonic sensing, Quantum and spin devices engineering, RF components, RF front-end design, Sense, Short-range optical communications, Stretchable and flexible sensors, ThinkInductively Coupled Plasma Reactive Ion Etcher(ICP-RIE): Oxford Instruments PlasmaLab System 10...
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AMO GmbH
Deposition
Showroom AMO GmbH Devices / Test structures, Dielectric deposition, Dry etching, e-beam lithography, Electrical, Magnetic, Mechanical, Metal deposition, Metrology / Characterisation, Modelling / Database, Optical, Optical lithography, Physical/Structural, Plasma etching, Processing/Fabrication, Wet etching Advanced sensing, Component Neuromorphic computing, Connect, Photonic sensing, Quantum and spin devices engineering, RF components, RF front-end design, Sense, Short-range optical communications, Stretchable and flexible sensors, ThinkSputtering system: Creavac Creamet500s
E-beam evaporator: FHR Star 200 EVA,
Plasma-enhance...
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AMO GmbH
Advanced Lithography Tool
Showroom AMO GmbH Devices / Test structures, Dielectric deposition, Dry etching, e-beam lithography, Electrical, Magnetic, Mechanical, Metal deposition, Metrology / Characterisation, Modelling / Database, Optical, Optical lithography, Physical/Structural, Plasma etching, Processing/Fabrication, Wet etching Advanced sensing, Component Neuromorphic computing, Connect, Photonic sensing, Quantum and spin devices engineering, RF components, RF front-end design, Sense, Short-range optical communications, Stretchable and flexible sensors, ThinkElectron Beam Lithography(EBL): Raith EBPG 5200
Photolithography(PL): Semi-Automatic Mask Ali...
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AMO GmbH
Characterization
Showroom AMO GmbH Dielectric deposition, Dry etching, e-beam lithography, Metal deposition, Optical lithography, Plasma etching, Processing/Fabrication, Wet etching Advanced sensing, Component Neuromorphic computing, Connect, Photonic sensing, Power, Quantum and spin devices engineering, RF components, RF front-end design, Sense, Short-range optical communications, Stretchable and flexible sensors, Sustain, ThinkAMO runs a class 10 to class 1000 cleanroom with a total area of 400 m². High-end production f...
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AMO GmbH