FIB-STEM
Showroom CNRS-FMNT Metrology / Characterisation, Physical/Structural Component Neuromorphic computing, Connect, Energy autonomy, Hybrid SiP/SoC, PMU design, Power, Power electronics, Quantum and spin devices engineering, RF components, RF front-end design, Short-range optical communications, Sustain, ThinkThis tool consists of a scanning electronic microscope SEM equipped with a focalized ion beam F...
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CNRS-FMNT
Physico-chemical Characterisation
Showroom CNRS-FMNT Dielectric deposition, Dry etching, e-beam lithography, Electrical, Magnetic, Mechanical, Metal deposition, Metrology / Characterisation, Optical, Optical lithography, Physical/Structural, Plasma etching, Processing/Fabrication, Wet etching Advanced sensing, Connect, Energy autonomy, Green electronics and substrates, Green sensors, Hybrid SiP/SoC, Photonic sensing, Power, Power electronics, RF components, RF front-end design, Sense, Short-range optical communications, Stretchable and flexible sensors, SustainThe Physico-chemical Characterisation - IMPACT platform integrates several physico-chemical ch...
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CNRS-FMNT
Terahertz characterisation
Showroom CNRS-FMNT Electrical, Magnetic, Mechanical, Metrology / Characterisation, Optical, Physical/Structural Advanced sensing, Component Neuromorphic computing, Connect, Energy autonomy, Green electronics and substrates, Green sensors, Hybrid SiP/SoC, Photonic sensing, PMU design, Power, Power electronics, Quantum and spin devices engineering, RF components, RF front-end design, Sense, Short-range optical communications, Stretchable and flexible sensors, Sustain, ThinkTerahertz characterisation - PLATERA platform: Terahertz (50 GHz – 4 THz) characterization an...
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CNRS-FMNT
Hyperfrequency Characterisation Platform
Showroom CNRS-FMNT Devices / Test structures, Electrical, Magnetic, Mechanical, Metrology / Characterisation, Optical, Physical/Structural Connect, Green electronics and substrates, Green sensors, Hybrid SiP/SoC, RF components, RF front-end design, SustainThis platform is dedicated to the analysis and characterization, on a wide band of frequency, o...
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CNRS-FMNT
Test & Characterization Platform
Showroom CNRS-FMNT Devices / Test structures, Electrical, Magnetic, Mechanical, Metrology / Characterisation, Modelling / Database, Optical, Physical/Structural Advanced sensing, Connect, Energy autonomy, Green electronics and substrates, Green sensors, Photonic sensing, Power, Power electronics, RF components, RF front-end design, Sense, Stretchable and flexible sensors, SustainTest and Characterisation Platform - Electrical, optical and physical characterization of mater...
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CNRS-FMNT
Wet Chemistry
Showroom AMO GmbH Devices / Test structures, Dielectric deposition, Dry etching, e-beam lithography, Electrical, Magnetic, Mechanical, Metal deposition, Metrology / Characterisation, Modelling / Database, Optical, Optical lithography, Physical/Structural, Plasma etching, Processing/Fabrication, Wet etching Advanced sensing, Component Neuromorphic computing, Connect, Photonic sensing, Quantum and spin devices engineering, RF components, RF front-end design, Sense, Short-range optical communications, Stretchable and flexible sensors, ThinkWet bench for imprint processes: Arias
Lithography wet bench: Arias
Standard cleaning: Arias
...
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AMO GmbH
Dry Etching
Showroom AMO GmbH Devices / Test structures, Dielectric deposition, Dry etching, e-beam lithography, Electrical, Magnetic, Mechanical, Metal deposition, Metrology / Characterisation, Modelling / Database, Optical, Optical lithography, Physical/Structural, Plasma etching, Processing/Fabrication, Wet etching Advanced sensing, Component Neuromorphic computing, Connect, Photonic sensing, Quantum and spin devices engineering, RF components, RF front-end design, Sense, Short-range optical communications, Stretchable and flexible sensors, ThinkInductively Coupled Plasma Reactive Ion Etcher(ICP-RIE): Oxford Instruments PlasmaLab System 10...
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AMO GmbH
Deposition
Showroom AMO GmbH Devices / Test structures, Dielectric deposition, Dry etching, e-beam lithography, Electrical, Magnetic, Mechanical, Metal deposition, Metrology / Characterisation, Modelling / Database, Optical, Optical lithography, Physical/Structural, Plasma etching, Processing/Fabrication, Wet etching Advanced sensing, Component Neuromorphic computing, Connect, Photonic sensing, Quantum and spin devices engineering, RF components, RF front-end design, Sense, Short-range optical communications, Stretchable and flexible sensors, ThinkSputtering system: Creavac Creamet500s
E-beam evaporator: FHR Star 200 EVA,
Plasma-enhance...
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AMO GmbH
Advanced Lithography Tool
Showroom AMO GmbH Devices / Test structures, Dielectric deposition, Dry etching, e-beam lithography, Electrical, Magnetic, Mechanical, Metal deposition, Metrology / Characterisation, Modelling / Database, Optical, Optical lithography, Physical/Structural, Plasma etching, Processing/Fabrication, Wet etching Advanced sensing, Component Neuromorphic computing, Connect, Photonic sensing, Quantum and spin devices engineering, RF components, RF front-end design, Sense, Short-range optical communications, Stretchable and flexible sensors, ThinkElectron Beam Lithography(EBL): Raith EBPG 5200
Photolithography(PL): Semi-Automatic Mask Ali...
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AMO GmbH
Characterization
Showroom AMO GmbH Dielectric deposition, Dry etching, e-beam lithography, Metal deposition, Optical lithography, Plasma etching, Processing/Fabrication, Wet etching Advanced sensing, Component Neuromorphic computing, Connect, Photonic sensing, Power, Quantum and spin devices engineering, RF components, RF front-end design, Sense, Short-range optical communications, Stretchable and flexible sensors, Sustain, ThinkAMO runs a class 10 to class 1000 cleanroom with a total area of 400 m². High-end production f...
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AMO GmbH